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Shape controllable micro-nozzle fabrication |
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| Authors: | KyungNam Kang Yoonyoung Jin Jost Goettert Pratul K. Ajmera |
| Affiliation: | 1. Department of Electrical and Computer Engineering, Louisiana State University, Baton Rouge, LA, 70803, USA 2. Center for Advanced Microstructures and Devices, Louisiana State University, Baton Rouge, LA, 70806, USA |
| Abstract: | A novel fabrication method involving two-step sequential backside exposures utilizing Fraunhofer diffraction is developed in this work to overcome some of the limitations of the current micro-nozzle fabrication techniques in controlling the shape and the size of micro-nozzles. Shape and size of the fabricated micro-nozzles are compared with simulation results. Micro-nozzles with tip diameters varying from 0 to 158.1 μm and the base diameter varying from 167.2 to 360 μm are fabricated simultaneously side-by-side on the same substrate by varying the total exposure dosage from 3 to 6 J/cm2 utilizing multiple backside exposures through designed circular aperture and zone plate masks. |
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