Highly enhanced mechanical stability of indium tin oxide film with a thin Al buffer layer deposited on plastic substrate |
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Authors: | Boyeon Sim |
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Affiliation: | Department of Materials Science and Engineering, Yonsei University, 134 Shinchon-dong, Seoul 120-749, Republic of Korea |
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Abstract: | We here report that the mechanical stability of indium tin oxide (ITO) film deposited on the plastic substrate can be highly enhanced by a thin metal buffer layer with a minimized loss of transparency. Neither cracks nor fragmentation was observed for a 75 nm-thick ITO film with a 5 nm-Al layer even after severe bending to a radius of curvature of 1.25 mm, while a 160 nm-ITO film of similar surface resistance was cracked at 9 mm. The improved crack resistance is accounted for by the fact that the effective elastic mismatch between the film and the substrate can be alleviated with a ductile buffer layer, thus the crack propagation is suppressed. |
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Keywords: | 68 37 -d 62 20 mt 68 35 -p |
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