金属氮化物硬质膜层“合金化”的研究进展

通过展示近年来国内外金属氮化物膜层的研究结果，探究了膜层晶体结构、微观组织的变化规律和提高性能的途径；列举了大量文献进行分析.结果表明：添加C或B元素，可形成“替位式”的金属氮碳化物或氮硼化物膜层，具有明显的固溶强化效应；大部分氮硼化物膜层，都可生成细小的金属硼化物，对性能的提高非常有力；加入Si可以细化晶粒，提高膜层的韧性和耐磨性.在TiN和CrN膜层中加入金属合金化元素(如Al、Zr等)，除具有明显的固溶强化效应外，还能显著提高膜层的高温氧化阻力和腐蚀阻力，提高膜层的耐磨性.沉积膜层的显微组织结构，可以通过调整“合金化”元素的比率来改变，并由此可以对膜层性能进行调制.通过“合金化”，金属氮化物膜层的晶体结构、微观组织都可以调制，综合性能显著改善和提高.

Development of alloyed metal nitride hard coating

Recent development of metal nitride coatings was reviewed.The crystal lattice and microstructure of deposited coatings as well as the measure to improve properties were investigated.A large amount of references were analyzed.The addition of either C or B element to the binary metal nitride coatings leads to the formation of metal carbonitride or metal carboboride coatings,which have the obvious solid solution strengthening effect.For the metal carboboride coatings,large amounts of fine metal borides form,which can greatly improve the properties.With adding Si to the coatings,the size of grain is reduced,and both toughness and wear resistance get greatly increased.Through adding such metal elements as Al,Zr to TiN or CrN,the high temperature oxide-resistance,erosion resistance and wear resistance as well as the effect of solid solution strengthening get significantly enhanced.Adjusting the ratio of alloying elements can change the microstructure of the coatings, and thus modulate the properties of the coatings.The crystal lattice and microstructure of the coatings can be modulated by alloying,and the properties of the metal nitride coatings are significantly improved in comparison with its binary counterparts.