Improved barium fluoride process YBa2Cu3)7-x films via post-anneal monitoring

The continuous monitoring of the conversion, of Y, Cu and BaF₂ precursors to form superconductor thin films has been achieved using a fluorine-specific-ion electrode immersed in an effluent gas-washing cell. High-quality thin films of YBa₂Cu₃O_7-x deposited on NdGaO₃, LaA10₃ and LaGaO₃, have been produced by limiting the wet oxygen annealing phase of the post-deposition anneal. When the films were over-annealed in humidified oxygen the superconducting transition temperature as measured by inductive methods and the crystal quality, determined by x-ray rocking curves were degraded.