| 硅基微磁通门非晶Fe96Nb4铁芯薄膜的研究 |
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| 引用本文： | 梁晋涛,刘诗斌,张程煜.硅基微磁通门非晶Fe96Nb4铁芯薄膜的研究[J].稀有金属材料与工程,2010,39(5):871-873. |
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| 作者姓名： | 梁晋涛 刘诗斌 张程煜 |
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| 作者单位： | 1. 西北工业大学,陕西,西安,710072;桂林电子科技大学,广西,桂林,541004
2. 西北工业大学,陕西,西安,710072 |
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| 基金项目： | 国家自然科学基金，西安应用材料创新基金，西北工业大学基础基金 |
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| 摘 要： | 采用磁控溅射法制备一种适合用于硅基微磁通门的新型非晶Fe96Nb4软磁铁芯薄膜,并利用X射线衍射仪、扫描电子显微镜、振动样品磁强计测试薄膜的相组成、表面形貌、和磁滞回线,用双铁芯磁通门探头线圈对制作的铁芯薄膜进行试验.结果表明:随制备温度的升高,薄膜的缺陷明显减小,软磁性能显著改善.基片温度为630 K时制作的硅基Fe96Nb4铁芯薄膜的性能适合用于微磁通门铁芯材料.
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| 关 键 词： | Fe96Nb4铁芯薄膜 软磁 微磁通门 双铁芯磁探头 |
| 收稿时间： | 2009/9/23 0:00:00 |
Research on Silicon-Based Micro-Fluxgate Amorphous Fe96Nb4 Core Thin Film |
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| Liang Jintao,Liu Shibin and Zhang Chengyu.Research on Silicon-Based Micro-Fluxgate Amorphous Fe96Nb4 Core Thin Film[J].Rare Metal Materials and Engineering,2010,39(5):871-873. |
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| Authors: | Liang Jintao Liu Shibin and Zhang Chengyu |
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| Abstract: | A new type of amorphous Fe96Nb4 core soft-magnetic thin film suitable for silicon-based micro-fluxgate was prepared by magnetron sputtering technique. Its phase composition, surface morphology and magnetic hysteresis loop were characterized by X-ray diffractometer, SEM and VSM (vibration sample magnetometer), respectively. The core film was examined by a double-cores fluxgate sensor. The results show that the defects of films decrease when they are prepared at high temperature. Meanwhile, its soft magnetic properties are improved significantly. Silicon-based Fe96Nb4 core thin film prepared at 630 K of the substrate is suitable for the application in the micro-fluxgate iron core materials. |
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| Keywords: | Fe96Nb4 core thin film soft magnetic properties micro-fluxgate double-cores fluxgate sensor |
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