| 纳米技术在半导体陶瓷气体传感器中的应用 |
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| 引用本文： | 施云波,陈耐生.纳米技术在半导体陶瓷气体传感器中的应用[J].传感器与微系统,2000,19(6):1-3,6. |
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| 作者姓名： | 施云波 陈耐生 |
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| 作者单位： | 1. 信息产业部电子第四十九研究所,黑龙江,哈尔滨,150001
2. 福州大学,化学系,福建,福州,350002 |
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| 摘 要： | 纳米技术可获得高活性的气敏陶瓷材料，利用纳米技术的二大效应即表面效应和量子尺寸效应，可使气体传感器的灵敏度和选择性提高，着重地介绍气敏材料纳米化的机理基础，制备方法及工艺控制。
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| 关 键 词： | 纳米技术 纳米效应 制备方法 气敏材料 |
| 文章编号： | ： |
Application of nanometer technology in semiconductor ceramic gas sensor |
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| SHI Yun-bo,CHEN Nai-sheng.Application of nanometer technology in semiconductor ceramic gas sensor[J].Transducer and Microsystem Technology,2000,19(6):1-3,6. |
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| Authors: | SHI Yun-bo CHEN Nai-sheng |
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| Abstract: | High sensitive gas ceramics can be obtained by using the nanometer technology and with its two main effects, surface effect and quantum dimension effect, the gas sensors sensitivity and selection can be improved. The fundamental mechanism of gas sensoring material's nanometer technology, preparation methods, technology control are introduced. |
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| Keywords: | nanometer technology nanometer effect preparation method gas sensing material |
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