| 用于地球物理勘探的MEMS加速度传感器 |
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| 引用本文： | 张宏乐,曹金栋.用于地球物理勘探的MEMS加速度传感器[J].石油仪器,2002,16(2):1-4. |
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| 作者姓名： | 张宏乐 曹金栋 |
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| 作者单位： | 涿州,石油地球物理勘探局特种装备勘探处 |
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| 摘 要： | 传统速度检波器由于内在结构的限制 ,其技术性能已不能满足现代高分辨率地震勘探数据采集的要求。美国I/O公司利用MEMS技术研制开发的加速度传感器具有良好的频率响应特性 ,可在检波器内部进行模 /数转换 ,实现检波器数字信号输出。文章对MEMS技术特点及发展现状、MEMS加速度传感器结构及主要技术性能做简要介绍 ,并给出了传统检波器与MEMS加速度传感器野外数据采集的具体实例
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| 关 键 词： | MEMS技术 加速度传感器 频率响应 地震勘探 |
| 修稿时间： | 2001年12月9日 |
MEMS acceleration sensor for geophysical prospecting |
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| Zhang Hongle and Cao Jindong..MEMS acceleration sensor for geophysical prospecting[J].Petroleum Instruments,2002,16(2):1-4. |
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| Authors: | Zhang Hongle and Cao Jindong |
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| Affiliation: | Zhang Hongle and Cao Jindong. |
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| Abstract: | The traditional seismic geophone can not meet the requirement of modern high resolution seismic data exploration due to the restraint of its intrinsic structure. Input/Output Inc. has developed an accelerometer utilizing the MEMS technology. The accelerometer realizes A/D transform inside the sensor and outputs digital signals. It has good frequency response. The paper briefly introduces the MEMS technical characteristics, the MEMS developing status, the structure and essential properties of the accelerometer. The paper also gives the contrast between MEMS sensor and the tradition geophone in the field seismic data acquisition. |
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| Keywords: | MEMS technology acceleration sensor frequency response seismic exploration |
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