The effects of the operational parameters of the reactor on ECR plasma characteristics |
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| Authors: | Yue Liu Yingxin Wang Shaoyan Cui Xudan Wang Shu Zheng Xiaogang Wang |
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| Affiliation: | aState Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Department of Physics, Dalian University of Technology, Dalian 116024, Liaoning Province, PR China |
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| Abstract: | A two-dimensional axis-symmetric model is adopted to investigate the characteristics of an electron cyclotron resonance plasma. The mass conservation equations of electrons, positive ions, and metastable atoms, the electron energy equation, and the Poisson equation are used in this multi-component system. The magnetic field generated by coils was computed numerically. The distributions of temperature and density of electrons are calculated by the finite difference method. The results of the numerical simulation for argon plasma shows that, in the phase of a long-time discharge, the electron temperature in the resonance chamber is higher than that in the reactor chamber, and electron density in the resonance chamber is lower than that in the reactor chamber. In addition, the effects of pressure on the two distributions are illustrated and discussed. |
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| Keywords: | ECR plasma Numerical simulation Electron density Electron temperature |
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