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电涡流位移传感器线圈电磁场仿真分析
引用本文:罗承刚.电涡流位移传感器线圈电磁场仿真分析[J].传感器与微系统,2008,27(3):24-26.
作者姓名:罗承刚
作者单位:中国工程物理研究院结构力学研究所,四川,绵阳,621900
摘    要:由于电涡流传感器的探头参数对其性能的影响比较显著,设计电涡流传感器的关键在于对探头线圈进行优化。采用有限元技术(AnsoftM axwell软件)对包括线圈和金属靶板的电涡流位移传感器进行电磁场数值仿真,得到了激励线圈的磁力线和被测靶板中电涡流的密度分布。并通过线圈等效阻抗的实验与计算结果定量比较,验证了仿真分析过程的正确性,为进一步完善传感器的理论分析和优化设计打下了基础。

关 键 词:电涡流位移传感器  线圈  电磁场  有限元
文章编号:1000-9787(2008)03-0024-03
修稿时间:2007年8月30日

Electromagnetic simulation and analysis for coil of eddy current proximity sensors
LUO Cheng-gang.Electromagnetic simulation and analysis for coil of eddy current proximity sensors[J].Transducer and Microsystem Technology,2008,27(3):24-26.
Authors:LUO Cheng-gang
Abstract:Parametric changes of eddy current sensors have significant influence on its performances,so the key for design of the sensors is to optimize probe coils.Electromagnetic numerical simulation for eddy current proximity sensors including coil and metallic target is finished with finite element analysis software Ansoft Maxwell.Magnetic lines from excitation coil and eddy current density distribution in target are calculated.Experimental result and simulating result of coil impedance are compared quantitatively,and the accurateness of simulation process is verified,so it will contribute to further perfect theoretical analysis and optimal design for eddy current sensors.
Keywords:eddy current proximity sensors  coil  electromagnetic field  finite element
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