| 厚膜光学参数的椭偏消光法测量 |
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| 引用本文： | 邓鸿飞.厚膜光学参数的椭偏消光法测量[J].天津城市建设学院学报,1995,1(3):22-24. |
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| 作者姓名： | 邓鸿飞 |
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| 作者单位： | 天津理工一分院 |
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| 摘 要： | 讨论了三相椭偏方程对于解算膜厚大于一个周期的介质薄膜(厚膜)光学参数的原理和方法；给出了在WJZ型多功能激光椭偏仪上进行的测量实例及计算结果。
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| 关 键 词： | 激光椭偏仪 厚膜 光学参数 椭偏测量术 数值选代 |
ELLIPSOMETRY AND CACULATION ON OPTICAL PARAMETERS FOR THICK-FILM |
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| Deng Hongfei.ELLIPSOMETRY AND CACULATION ON OPTICAL PARAMETERS FOR THICK-FILM[J].Journal of Tianjin Institute of Urban Construction,1995,1(3):22-24. |
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| Authors: | Deng Hongfei |
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| Affiliation: | Ist College Attached to Tianjin Institute of Science and Technology |
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| Abstract: | The princeple and methods to compute optical paramenters, for medium filmwith thickness greater than one cycle, by a three-phase elliptical polarization equation are discussed, and several examples measured by Model-WJZ Multifunctional Laser ellipsometer andcomputing results are given in this paper. |
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| Keywords: | ellipsometry numerical ineration thick-film |
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