平面光学元件平面度动态干涉拼接测量

开展了基于动态干涉仪的平面光学元件平面度干涉拼接测量,并研究了影响测量和拼接的主要误差。用二级减振的方法来抑制环境中振动的影响;根据允许的变化条纹数来控制二维移动平台导轨精度。建立了以ZYGO公司的DynaFiz干涉仪为子口径采集仪器的干涉拼接系统,开展了单口径平面度测量及拼接实验,完成了200mm×300mm 平面光学元件的平面度测试,并与大口径干涉仪所测试的全口径测量数据进行比对,拼接结果的10次实验均方差为0.001λ(λ=632.8nm)。

Stitching Measurement of Plane Optical Element Flatness by Dynamic Interference

The stitching measurement of plane optical element flatness is carried out based on dynamic interferometer and it studies the main factors affecting the measurement.The environment vibration is suppreseed using two grade damping.It controls the precision of two-dimensional mobile platform according to the allowed change numbers of stripe.It establishes an interference stitching system using the ZYGO company’s DynaFiz interferometer for sub-aperture data acquisition instrument. The single aperture flatness measurement and stitching measurement experiments were carried out. The flatness measurement of the 200mm×300mm plane optical element was completed and the results with the full aperture measurement data measured by a large diameter interferometer was compared. The stitching results variance of 10 experiments is 0.001λ(λ=632.8nm).