| 软X射线—真空紫外反射率计 |
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| 引用本文： | 陈波,马玲,李福田.软X射线—真空紫外反射率计[J].光学精密工程,1991,0(6):21-25. |
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| 作者姓名： | 陈波 马玲 李福田 |
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| 摘 要： | 软X射线-真空紫外反射率计系统由光源、单色仪、反射率计、电子学及微机控制系统等几部分组成。可完成各种光学镜面、光栅、成像系统等的性能评价工作,反射率计真空室直径φ800mm,长1200mm,工作波段25～100nm,更换光源和探测器可扩展到1～250nm,角分辨率0.03°,扫描范围0～90°。
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Soft X-ray and VUV Reflectometer |
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| Chen Bo,Ma Ling,Li Futian.Soft X-ray and VUV Reflectometer[J].Optics and Precision Engineering,1991,0(6):21-25. |
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| Authors: | Chen Bo Ma Ling Li Futian |
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| Abstract: | Soft X-ray and VUV reflectometer system consists of VUV source, monochromator, reflectometer, electronics unit and microcomputer. The evaluation of optical mirrors, gratings and image system can be completed by this system. The vacuum chamber of the reflectometer is 800mm in diameter by 1200mm in length. The system can be operated from 25nm to 100nm. The sample stage permits rotation with respect to incident beam with resolution of 0.03 degree and a travel range extending between 0 and 90 degree. |
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