Abstract: | In this paper, a two‐dimensional (2D) analytical sub‐threshold model for a novel sub‐50 nm multi‐layered‐gate electrode workfunction engineered recessed channel (MLGEWE‐RC) MOSFET is presented and investigated using ATLAS device simulator to counteract the large gate leakage current and increased standby power consumption that arise due to continued scaling of SiO2‐based gate dielectrics. The model includes the evaluation of surface potential, electric field along the channel, threshold voltage, drain‐induced barrier lowering, sub‐threshold drain current and sub‐threshold swing. Results reveal that MLGEWE‐RC MOSFET design exhibits significant enhancement in terms of improved hot carrier effect immunity, carrier transport efficiency and reduced short channel effects proving its efficacy for high‐speed integration circuits and analog design. Copyright © 2008 John Wiley & Sons, Ltd. |