| 激活工艺和表面气体压强对一种改性锆石墨吸气剂吸气性能的影响 |
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| 引用本文： | 熊玉华,尉秀英,秦光荣,苑鹏,毛昌辉,杜军.激活工艺和表面气体压强对一种改性锆石墨吸气剂吸气性能的影响[J].真空科学与技术学报,2007,27(5):400-404. |
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| 作者姓名： | 熊玉华 尉秀英 秦光荣 苑鹏 毛昌辉 杜军 |
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| 作者单位： | 北京有色金属研究总院先进电子材料研究所,北京,100088 |
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| 摘 要： | 用粉末冶金工艺制备了一种改性的锆石墨类吸气剂,研究了激活工艺和吸气剂表面气体压强对该吸气剂吸气性能的影响。结果表明：该类吸气剂具有优越的室温吸气性能。高温短时间的激活效果优于低温长时间。增加吸气剂表面气体压强Pg有利于提高吸气剂的吸气速率和吸气量,且适当增加Pg比提高激活温度更有利于提高吸气剂的吸气性能。本文从吸气剂对气体分子的吸附和扩散作用机理解释了上述结果。
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| 关 键 词： | 吸气剂 烧结 激活 吸气速率 吸气量 |
| 文章编号： | 1672-7126（2007）05-400-05 |
| 修稿时间： | 2006-12-28 |
Improvement of Zr-C Getters by Surface Activation |
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| Xiong Yuhua,Wei Xiuying,Qin Guangrong,Yuan Peng,Mao Changhui,Du Jun.Improvement of Zr-C Getters by Surface Activation[J].JOurnal of Vacuum Science and Technology,2007,27(5):400-404. |
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| Authors: | Xiong Yuhua Wei Xiuying Qin Guangrong Yuan Peng Mao Changhui Du Jun |
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| Affiliation: | Advanced Electronic Materials Institute, General Research Institute for Nonferrous Metals, Beijing 100088, China |
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| Abstract: | A novel type of Zr-C getters was fabricated by powder metallurgy. The influence of its activation conditeons, such as the activation temperature, pressure and time, on its sorption characteristics was studied. The results show that activated Zr-C getter works well at room temperature, and that the high pressure, Ps, activation affects its sorption characteristics more strongly than the high temperature, short time activation does. Possible mechanisms were also tentatively discussed. |
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| Keywords: | Getter Sinter Activation Gettering rate Quantity absorbed |
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