Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: topography

We have measured the topography of a holographic ion-etched spherical blazed grating and three of its replicas using an atomic force microscope. The master grating had a roughness of less than 5 angstroms rms, a blaze angle of 2.5 degrees, and an antiblaze angle of 3.3 degrees. Thus the groove profile was more triangular than sawtooth. We find that the replication process did not significantly change the master grating. Moreover, we find no significant difference in roughness, blaze angle, or antiblaze angle between the master and its replicas before or after multilayer coating. However, bumps were observed on the gratings after coating, the cause of which is not understood. Although widespread, they occupy a relatively small fraction of the total area.