| PREPARATION OF B-N FILMS BY ION BEAM ASSISTED DEPOSITION |
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| 作者姓名： | JIANG Hai TAO Kun LI Hengde Tsinghua University Beijing China lecturer |
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| 作者单位： | JIANG Hai TAO Kun LI Hengde Tsinghua University，Beijing，China lecturer，Department of Materials Science and Engineering，Tsinghua University，Beijing 100084，China |
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| 摘 要： | BN films,synthesized by ion beam assisted deposition,were analysed by RBS,AES,IR spectra and TEM.Formatiom of c-BN phase was shown not only by IR spectra atabsorption peak of 1100 cm~(-1),but also by electron diffraction pattern.The results ofAES demonstrate an effect of N~+ implantation near the film surface.The deposited filmsconsist of three layers,i.e.,ion implantation layer,film layer and mixed intermediatelayer,according to the difference of concentration.The micro-Knoop hardness of the film is25—35 GPa.
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| 收稿时间： | 1993-11-11 |
| 修稿时间： | 1993-11-11 |
PREPARATION OF B-N FILMS BY ION BEAM ASSISTED DEPOSITION |
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| JIANG Hai TAO Kun LI Hengde Tsinghua University,Beijing,China lecturer,.PREPARATION OF B-N FILMS BY ION BEAM ASSISTED DEPOSITION[J].Acta Metallurgica Sinica(English Letters),1993,6(11):379-382. |
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| Authors: | JIANG Hai TAO Kun LI Hengde Tsinghua University Beijing China lecturer |
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| Affiliation: | JIANG Hai TAO Kun LI Hengde Tsinghua University,Beijing,China lecturer,Department of Materials Science and Engineering,Tsinghua University,Beijing,China |
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| Abstract: | BN films,synthesized by ion beam assisted deposition,were analysed by RBS,AES, IR spectra and TEM.Formatiom of c-BN phase was shown not only by IR spectra at absorption peak of 1100 cm~(-1),but also by electron diffraction pattern.The results of AES demonstrate an effect of N~+ implantation near the film surface.The deposited films consist of three layers,i.e.,ion implantation layer,film layer and mixed intermediatelayer, according to the difference of concentration.The micro-Knoop hardness of the film is 25—35 GPa. |
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| Keywords: | ion beam assisted deposition BN film |
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