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Characterization of Superconductor Coplanar Resonators Deposited on Different Substrates by Thermal Coevaporation |
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| Authors: | D Seron H Kokabi G Alquié Y Roelens N Bourzgui J C Carru |
| Affiliation: | 1. Laboratoire des Instruments et Systèmes d’Ile de France (LISIF), Université Paris 6, Case 252, 4 Place Jussieu, 75252, Paris, Cedex 05, France 2. Institut d’Electronique de Microélectronique et de Nanotechnologie (IEMN), UMR 8520, Université de Lille 1, Avenue Poincaré BP, 69-59652, Villeneuve d’Ascq, France 3. Laboratoire d’Etude des Matériaux et des Composants pour l’Electronique (LEMCEL), Université du Littoral-C?te d’Opale, 50 rue F. Buisson, BP, 717-62228, Calais, Cédex, France |
| Abstract: | This study is based on two commercially available YBCO thin films deposited by the thermal coevaporation method on different substrates (MgO and LaAlO3). Those films should be optimized for microwave applications. The structure and microstructure of the film deposited on LaAlO3 have been investigated, respectively by XRD and SEM. These characterizations showed the high quality of the films concerning the c-axis orientation and the smooth and homogenous morphology. The films have then been etched into two different coplanar line resonators by ionic method (YBCO/LaAlO3) and chemical one (YBCO/MgO) and their microwave properties have been characterized in two different cryogenic experimental set-ups. Despite the differences between these coplanar resonators, we have obtained the same intrinsic parameters (λ0 = 190 nm, T c=87 K with γ = 3) corresponding to the data provided by THEVA and a very low surface resistance (R s=0.4 m Ω at 31 K and 10 GHz). |
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