| 微机械加速度计中的寄生电容对噪声的影响 |
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| 引用本文： | 朱忠益,刘义冬,金仲和,卓露.微机械加速度计中的寄生电容对噪声的影响[J].传感技术学报,2013,26(1):17-20. |
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| 作者姓名： | 朱忠益 刘义冬 金仲和 卓露 |
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| 作者单位： | 浙江大学微小卫星研究中心,杭州,310027 |
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| 基金项目： | 中央高校基本科研业务费专项资金资助(2012QNA4021) |
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| 摘 要： | 主要分析变面积式微机械加速度敏感元件中的固定平行电极间寄生电容对系统噪声的影响,建立敏感元件的电磁仿真模型,进行噪声公式的推导,并得到了实验验证.通过仿真分析发现,铝电极下的玻璃衬底是增大该寄生电容的主要因素.实验结果表明,该寄生电容会增加60％以上的系统噪声.
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| 关 键 词： | 微机电加速度计 寄生电容 噪声分析 电容检测 |
The Parasitic Capacitance’s Influence on Noise in a MEMS Accelerometer Sensor |
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| ZHU Zhongyi
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LIU Yidong
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JIN Zhonghe.The Parasitic Capacitance’s Influence on Noise in a MEMS Accelerometer Sensor[J].Journal of Transduction Technology,2013,26(1):17-20. |
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| Authors: | ZHU Zhongyi LIU Yidong JIN Zhonghe |
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| Affiliation: | *(Micro-Satellite Research Center,Zhejiang University,Hangzhou 310027,China) |
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| Abstract: | This paper mainly analyzes the influence on noise of the parasitic capacitance between the fixed parallel electrodes in a variable-area type MEMS accelerometer sensor. An electromagnetic simulation model is built. The noise formula is derived and it is verified by experiment. The simulation results indicate that the glass substrate under the parallel electrodes can increase the capacitance. The experiment results show that the parasitic capacitance will raise the noise by 60% or more. |
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| Keywords: | MEMS accelerometer parasitic capacitance noise analysis capacitance measurement |
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