| 氢稀释对纳米晶硅薄膜微结构的影响 |
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| 引用本文： | 于威,卢海江,路万兵,孟令海,王新占,韩理,傅广生.氢稀释对纳米晶硅薄膜微结构的影响[J].功能材料,2011,42(3):524-527. |
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| 作者姓名： | 于威 卢海江 路万兵 孟令海 王新占 韩理 傅广生 |
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| 作者单位： | 河北大学物理科学与技术学院; |
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| 基金项目： | 国家自然科学基金资助项目(60878040) |
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| 摘 要： | 采用电感耦合等离子体化学气相沉积技术制备了氮化纳米硅薄膜,利用Raman散射、x射线衍射、红外吸收等技术对不同氮稀释条件下薄膜的微观结构和键合特性变化进行了研究.结果表明,较高的氢稀释比导致薄膜从非晶硅到纳米晶硅的结构转化,随着氮稀释比的增加,所沉积薄膜的晶化度及纳米晶硅的晶粒尺寸单调增加,纳米硅颗粒呈现在(110)方...
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| 关 键 词： | 纳米晶硅薄膜 电感耦合等离子体 晶态比 氢稀释比 |
Effect of hydrogen dilution on microstructure of nanocrystalline silicon thin films |
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| YU Wei,LU Hai-jiang,LU Wan-bing,MENU Ling-hai,WANG Xin-zhan,HAN Li,FU Guang-sheng.Effect of hydrogen dilution on microstructure of nanocrystalline silicon thin films[J].Journal of Functional Materials,2011,42(3):524-527. |
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| Authors: | YU Wei LU Hai-jiang LU Wan-bing MENU Ling-hai WANG Xin-zhan HAN Li FU Guang-sheng |
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| Affiliation: | YU Wei,LU Hai-jiang,LU Wan-bing,MENG Ling-hai,WANG Xin-zhan,HAN Li,FU Guang-sheng (College of Physical Science and Technology,Hebei University,Baoding 071002,China) |
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| Abstract: | A series of hydrogenated nanosilicon films were prepared by inductively coupled plasmas(ICP) chemical vapor deposition technique from a mixture of SiH4 diluted in H2.A variety of techniques including Raman scattering,X-ray diffraction and infrared absorption were utilized to analyze the microstructure and bonding characteristic of the deposited films at different hydrogen dilution ratio.Results indicate that a rapid structural transformation from a mostly amorphous phase to comprehensive nanocrystal was att... |
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| Keywords: | hydrogenated nanocrystalline silicon hydrogen dilution radio inductively coupled plasmas crystalline fraction |
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