Laser-deposited tin dioxide and tin acetylacetonate layers for gas sensors

Thin active layers were deposited by the pulsed laser deposition (PLD) method from tin dioxide and tin acetylacetonate targets. The deposition was carried out employing an excimer KrF laser. The structure and parameters of the deposited layers were studied in connection with gas sensor applications. The influence of Ni dopant and Pd catalyst was investigated, employing PLD technology in order to introduce dopants as a multilayered structure. The properties of these layers were studied by Fourier transform infrared (FTIR), and X-ray photoelectron (XPS) spectroscopies and by measurement of their d.c. resistance. Under reducing gases the resistance of Ni-doped tin dioxide with a Pd catalyst layer decreases by 3 orders and the resistance of tin acetylacetonate with a Pd catalyst by 2 orders (synthetic air versus 1000 ppm H₂. Due to this, such layers are suitable as the active layers of gas sensors.