| 用碱性抛光液化学机械抛光304不锈钢片研究 |
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| 引用本文： | 陈佳鹏,陈绍坤,李庆,秦洪权,苏建修.用碱性抛光液化学机械抛光304不锈钢片研究[J].金刚石与磨料磨具工程,2016,36(2):6-9,23. |
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| 作者姓名： | 陈佳鹏 陈绍坤 李庆 秦洪权 苏建修 |
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| 作者单位： | 1. 河南科技学院 机电学院, 河南 新乡 453003;2. 驻马店技师学院 机械工程系, 河南 驻马店 463000;3. 河南理工大学 机械与动力工程学院, 河南 焦作 454000 |
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| 基金项目： | 国家自然科学基金面上项目（No.51375149） |
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| 摘 要： | 为提高化学机械抛光的加工效果，我们研究了pH值、氧化剂种类和氧化剂含量对材料去除率和表面粗糙度的影响。结果表明:不同氧化剂的抛光液在各自的最佳pH值时达到最大的材料去除率，分别为181 nm/min（H2O2抛光液，pH=9），177 nm/min（Cr2O3抛光液，pH=11），172 nm/min（Na2Cr2O7抛光液，pH=11）和147 nm/min（NaClO抛光液，pH=13）；抛光液中氧化剂含量、pH值对抛光后不锈钢的表面粗糙度影响较小。其中，材料去除率较高的H2O2和Cr2O3可作为304不锈钢化学机械抛光碱性抛光液的氧化剂。
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| 关 键 词： | 304不锈钢 碱性抛光液 pH值 氧化剂 化学机械抛光 材料去除率 |
Study on chemical mechanical polishing of 304 stainless steel sheet based on alkaline polishing slurry |
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| CHEN Jiapeng,CHEN Shaokun,LI Qing,QIN Hongquan,SU Jianxiu.Study on chemical mechanical polishing of 304 stainless steel sheet based on alkaline polishing slurry[J].Diamond & Abrasives Engineering,2016,36(2):6-9,23. |
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| Authors: | CHEN Jiapeng CHEN Shaokun LI Qing QIN Hongquan SU Jianxiu |
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| Affiliation: | 1. School of Mechanical and Electrical Engineering, Henan Institute of Science and Technology, Xinxiang 453003, Henan, China;2. Department of Mechanical Engineering, Zhumadian Technician College, Zhumadian 463000, Henan, China;3. School of Mechanical and Power Engineering, Henan Polytechnic University, Jiaozuo 454000, Henan, China |
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| Abstract: | To improve the effect of chemical mechanical polishing(CMP),the influence of oxidant and pH value on the material removal rate(MRR)and surface roughness has been studied.The results show that different oxidants obtain maximum MRRs at different optimal pH values,namely 181nm/min for hydrogen peroxide at pH=9,177 nm/min for chromic oxide at pH=11,172 nm/min for sodium dichromate at pH=11,and 147 nm/min for sodium hypochlorite oxidant at pH=11.It is also shown that the type of oxidant,the content of oxidant and the pH value in CMP slurry have little influence on the surface roughness of stainless steel in CMP 304 stainless steel.Due to high MRR,hydrogen peroxide and chromic oxide can be used as oxidants of alkaline slurry for polishing 304 stainless steel. |
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