| 硒化锌晶体超精密切削材料去除机理研究 |
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| 引用本文： | 耿瑞文,谢启明,张万清,康杰,梁悦青,杨晓京,李芮.硒化锌晶体超精密切削材料去除机理研究[J].红外与激光工程,2021,50(6):20200403-1-20200403-10. |
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| 作者姓名： | 耿瑞文 谢启明 张万清 康杰 梁悦青 杨晓京 李芮 |
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| 作者单位： | 1.昆明理工大学 机电工程学院，云南 昆明 650500 |
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| 基金项目： | 国家自然科学基金（51765027）；云南省教育厅科学研究基金项目（2019Y0037） |
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| 摘 要： | 硒化锌晶体在红外成像与激光系统中有着广泛的应用，作为典型软脆性材料，其材料去除机理目前尚不清晰，获得超光滑表面仍极具挑战。文中采用槽切法研究刀具负前角对硒化锌晶体脆塑转变临界深度的影响。通过分析最大未变形切削厚度随切削参数变化规律，提出实现硒化锌晶体塑性域切削的理论模型。借助场发射扫描电子显微镜、白光干涉仪和拉曼光谱仪，系统分析了进给率对工件表面粗糙度、表面完整性及亚表面损伤的影响，提出表面缺陷形成机理，进而揭示硒化锌晶体材料去除机理。
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| 关 键 词： | 硒化锌晶体 脆塑转变深度 塑性域切削 表面缺陷形成 材料去除机理 |
| 收稿时间： | 2020-10-22 |
Study on the material removal mechanism of ZnSe crystal via ultra-precision diamond turning |
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| Affiliation: | 1.Faculty of Mechanical and Electrical Engineering, Kunming University of Science and Technology, Kunming 650500, China2.Kunming Institute of Physics, Kunming 650233, China3.Faculty of Environmental Science and Engineering, Kunming University of Science and Technology, Kunming 650500, China |
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| Abstract: | ZnSe crystal has been widely used in infrared imaging and laser systems. However, as a typical soft-brittle material, the material removal mechanism in ultra-precision diamond turning process has not been clarified, it is still challenging to obtain nano-smoothed surface. In the study, the effect of tool ranke angle on ductile-brittle transition depth of ZnSe crystal have been investigated through novel plunge-cutting tests. The ductile regime machining model was revealed by comparing the maximum undeformed chip thickness and ductile-brittle transition depth. With the aid of FESEM, white light interferometer, and Raman spectrometer, the effect of feed rate on surface roughness, surface quality, phase transition and subsurface damage were systematically investigated. The surface defects formation mechanism was proposed. Furthermore, the material removal mechanism of ZnSe crystal in ultra-precision diamond turning process have been revealed. |
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