光学胶膜液体可变焦微透镜阵列

微透镜阵列在光束匀化、波前测量、集成成像等领域有广泛应用。设计了一种基于光学胶膜(Optically Clear Adhesive, OCA)的液体可变焦微透镜阵列。采用矩形排列的硅微孔阵列控制单个透镜的孔径和排布，并以OCA光学胶膜和去离子水作为微透镜阵列的塑形材料。通过调整微流体腔内液体注入的体积实现对透镜焦距从1.46~10.44 mm的调整。依据聚焦与成像实验证实了微透镜阵列具有良好的均匀性。最后，将该微透镜阵列应用于激光光束匀化整形，通过一对微透镜阵列实现了光束匀化整形。进一步通过固定一对微透镜阵列的间距实现匀化光斑尺寸在7.2~8.4 mm内可调，为匀化光斑尺寸可调提供了新思路。

Optical film liquid variable focus microlens array

Microlens arrays are widely used in beam homogenization, wavefront measurement, integrated imaging and other fields. A liquid tunable-focus plano-convex microlens array based on optical film (Optically Clear Adhesive, OCA) was demonstrated. A rectangular array of silicon microholes was used to control the aperture and arrangement of a single lens, and OCA optical film and deionized water were used as the shaping material of the microlens array. The focal length of the lens could be adjusted from 1.46 mm to 10.44 mm by adjusting the volume of liquid injection in the microfluidic cavity. According to the focusing and imaging experiments, it was confirmed that the microlens array had good uniformity. Finally, this microlens array was applied to laser beam homogenization and shaping. The beam homogenization and shaping were realized by a pair of microlens arrays. Furthermore, by fixing the spacing of a pair of microlens arrays, the size of the homogenized light spot can be adjusted within 7.2 mm to 8.4 mm, which provides a new idea for the adjustment of the size of the homogenized light spot.