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Hydrogen influence on the structure and properties of amorphous hydrogenated carbon films deposited by direct ion beam |
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| Authors: | M Silinskas A Grigonis |
| Affiliation: | a Institute of Micro- and Sensor Systems, Otto von Guericke University Magdeburg, Universitaetsplatz 2, 39106 Magdeburg, Germany b Physics Department, Kaunas University of Technology, Studentu str. 50, LT-3031 Kaunas, Lithuania c Nuclear Physics Institute, Moscow State University, 119899 Moscow, Russian Federation d Institute of Solid State Physics, University of Latvia, 8 Kengaraga St., Riga LV-1063, Latvia |
| Abstract: | The present work provides results for amorphous hydrogenated carbon (a-C:H) films grown by direct ion beam deposition method. Acetylene and its mixtures with hydrogen were used. The films were characterized by Rutherford backscattering spectrometry, elastic recoil detection, Raman spectroscopy, ellipsometry, infrared spectroscopy, and microhardness measurements. These techniques indicated that an admixture of hydrogen yields a lower deposition rate, a higher content of total and bounded hydrogen in the a-C:H films, and a lower film density. The optical and mechanical properties depend on both, hydrogen concentrations in the gas phase and in the films, and show a strong diamond-like component, which reaches maximum at 34 at.% of hydrogen. Further hydrogen dilution enhanced only sp2 clustering and possible reduced a number of both sp3 and C-C sp3 bonds. We suppose that these effects (in the high hydrogen concentration range) are not only related to the ion irradiation difference between the light hydrogen and the much heavier carbon but also to the diffusion in the a-C:H films. |
| Keywords: | Ion beam deposition Raman spectroscopy Hydrogen Amorphous hydrogenated carbon Elastic recoil detection Acetylene Rutherford backscattering experiments |
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