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Temperature dependence of sputtering behavior of Cu-Li alloys
Affiliation:1. Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon 305-338, Republic of Korea;2. Department of Materials Science and Engineering, Chungnam National University, Daejeon 305-764, Republic of Korea;3. School of Integrated Technology, Yonsei University, Incheon 406-840, Republic of Korea;4. National Nano Fab Center, Daejeon 305-806, Republic of Korea;1. College of Instrumentation and Electrical Engineering, Jilin University, Changchun 130061, China;2. State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China;3. School and Hospital of Stomatology, Jilin University, Changchun 130021, China;1. Centre of Excellence for Energy Research, Sathyabama Institute of Science and Technology, Chennai 600119, India;2. Centre for Nanoscience and Nanotechnology, Sathyabama Institute of Science and Technology, Chennai 600119, India;3. Department of Physics, Faculty of Physical and Mathematical Sciences, Post Box 160-C, University of Concepcion, Concepcion, Chile
Abstract:
Three different Cu-Li alloys (4, 10, and 16% Li) have been sputtered by 1 keV and 100 eV D+ ions. The Cu sputtering yield and the total weight loss was measured as a function of the target temperature between 25 and 700°C. The yield was measured by the catcher foil technique and by the weight loss method in order to differentiate between the total weight loss and the Cu sputtering yield (i.e., Rutherford backscattering analysis (RBS) of the catcher foil). Targets with lower Li concentration (4 and 10%) did not show a significant change of the Cu sputtering yield [1] as found by other authors [2] and this is probably due to the higher current density (1015 cm−2 s−1) in this experiment. An increase in weight loss at temepratures above 550°C was caused by Li evaporation. The target with high Li concentration (16% Li) showed a reduction of the Cu sputtering yield by more than a factor of 50 for both the 1 keV and the 100 eV D+ ions. This reduction occurs in a small temperature range around 550°C, which coincides with the transition on the Cu-Li phase diagram from the a-phase to α + liquid. For temperatures above 550°C the sputtering yield increases again, most probaby due to an enhanced evaporation of Li. At optimum temperature conditions, the evaporation rate of Li for the Cu-Li alloy is many orders of magnitude lower than the rate for pure Li. According to the phase diagram, the Cu-Li alloy with even higher Li concentration could reach optimum conditions at lower temperatures and, therefore, would be a promising first-wall candidate.
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