| 温度对超精密微位移系统定位精度影响的研究 |
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| 引用本文： | 卢泽生,张强.温度对超精密微位移系统定位精度影响的研究[J].机床与液压,2006(10):33-36. |
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| 作者姓名： | 卢泽生 张强 |
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| 作者单位： | 哈尔滨工业大学机械制造及自动化系,哈尔滨,150001 |
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| 摘 要： | 超精密微位移系统的定位精度除了与其本身的特性有关外，还与工作环境等因素密切相关。本文系统地分析了温度对压电陶瓷微驱动器、微进给工作台和检测元件的影响。采用有限元方法给出了微进给工作台在环境温度发生变化时的变形云图，说明了温度影响微进给工作台定位精度的原理。对各种检测元件受温度的影响进行了分析对比。最后从环境温度的控制、材料选择和检测元件3个方面给出了解决的措施。
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| 关 键 词： | 微进给工作台 压电陶瓷 温度 有限元法 微位移 |
| 文章编号： | 1001-3881(2006)10-033-4 |
| 收稿时间： | 2005-08-17 |
| 修稿时间： | 2005年8月17日 |
Effect of Temperature on Positioning Accuracy of Ultra-precision Micro-feed System |
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| LU Zesheng,ZHANG Qiang.Effect of Temperature on Positioning Accuracy of Ultra-precision Micro-feed System[J].Machine Tool & Hydraulics,2006(10):33-36. |
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| Authors: | LU Zesheng ZHANG Qiang |
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| Affiliation: | Department of Mechanical Manufacturing and Automation, Harbin Institute of Technology, Harbin 150001, China |
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| Abstract: | The positioning accuracy of ultra-precision flexure-hinge guided micro-feed system is related with piezoelectric(actuator),micro-feed stage,sensors,control system and environment conditions and so on.The effect of temperature on piezoelectric actuator,micro-feed stage,testing parts was analyzed,the change of micro-feed stage with the environmental temperature was simulated with finite element method,the principle that temperature influences the position precision of micro-feed stage was introduced.Solutions were brought forward from three facets:the control of environmental temperature,the choice of materials and testing parts. |
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| Keywords: | Micro- feed stage Piezoelectric actuator Temperature Finite element method Micro- feed |
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