| 金刚石薄膜的制备研究综述 |
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| 引用本文： | 黄 磊,王 陶,唐永炳.金刚石薄膜的制备研究综述[J].集成技术,2017,6(4):70-79. |
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| 作者姓名： | 黄 磊 王 陶 唐永炳 |
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| 作者单位： | 中国科学院深圳先进技术研究院 功能薄膜材料研究中心 深圳 518055 |
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| 基金项目： | 广东省创新团队项目，广东省自然科学基金，深圳市科技计划项目，中国科学院科研设备项目 |
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| 摘 要： | 金刚石薄膜具有优异的物理化学性质,在耐磨涂层、生物医学、薄膜微传感器、微机电系统等诸多领域有着广阔的应用前景.文章综述了近年来在金刚石薄膜领域研究的最新进展,着重介绍了目前主流的金刚石薄膜制备方法及优缺点,阐述了薄膜的生长机理以及提高金刚石薄膜沉积速率和质量的技术方法,为该领域的研究人员提供参考.
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| 关 键 词： | 金刚石薄膜 化学气相沉积 形核密度 生长机理 制备方法 |
| 收稿时间： | 2017/4/10 0:00:00 |
| 修稿时间： | 2017/5/26 0:00:00 |
Review on the Synthesis of Diamond Films |
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| Authors: | HUANG Lei WANG Tao and TANG Yongbing |
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| Abstract: | Benefited from the excellent physical and chemical properties of diamond, chemical vapour
deposition (CVD) diamond thin films have attracted continuous attentions among researchers regarding to both
basic research and industry application like cutting tools, biomedicine, thin film sensors and micro-electromechanical
systems etc. In this paper, recent progress in the field of diamond film research is reviewed. It is
mainly focused on various synthesis methods of diamond thin films and comparison of their pros and cons. By
introducing the growing mechanism of CVD diamond thin films, strategies to improve the deposition rates and
quality of diamond thin films are also discussed. |
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| Keywords: | diamond thin film chemical vapour deposition nucleation density growth mechanism preparation method |
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