| 二维超精密工作台自标定算法 |
| |
| 引用本文： | 朱立伟,朱煜,尹文生.二维超精密工作台自标定算法[J].工具技术,2006,40(7):12-16. |
| |
| 作者姓名： | 朱立伟 朱煜 尹文生 |
| |
| 作者单位： | 1. 清华大学精密仪器系,100084,北京市
2. 清华大学 |
| |
| 摘 要： | 基于刚性运动学理论建立了二维超精密工作台运动测量模型,并在此基础上使用辅助测量装置的三个测量位姿和二维傅里叶变换提出了二维超精密工作台自标定算法;通过应用实例验证了该算法的可行性和有效性。
|
| 关 键 词： | 超精密 二维工作台 自标定 |
| 收稿时间： | 2005-11 |
| 修稿时间： | 2005-11 |
Self-calibration Algorithm of Two-dimensional Ultra-precision Stage |
| |
| Zhu Liwei,Zhu Yu,Yin Wensheng.Self-calibration Algorithm of Two-dimensional Ultra-precision Stage[J].Tool Engineering(The Magazine for Cutting & Measuring Engineering),2006,40(7):12-16. |
| |
| Authors: | Zhu Liwei Zhu Yu Yin Wensheng |
| |
| Affiliation: | Zhu Liwei Zhu Yu Yin Wensheng |
| |
| Abstract: | The measurement model of two-dimensional ultra-precision stages is developed based on rigid body kinematics. According to this model the self-calibration algorithm of 2-D ultra-precision stages is presented using three measurement views of the artifact and the 2-D Fourier transfer method. An example is presented to verify the feasibility and availability of the given selfcalibration algorithm. |
| |
| Keywords: | ultra-precision two-dimensional stages self-cahbration |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
