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| 掺杂Al对DC反应溅射ZnO薄膜的影响 | |
| 引用本文： | 赵强,孙艳,郑丁葳,倪晟,王基庆,袁先漳.掺杂Al对DC反应溅射ZnO薄膜的影响[J].压电与声光,2007,29(3):324-327. |
| 作者姓名： | 赵强 孙艳 郑丁葳 倪晟 王基庆 袁先漳 |
| 作者单位： | 1. 华东师范大学,物理系,上海,200241 2. 中科院,上海技术物理研究所,上海,200083 3. 华东师范大学,电子科学与技术系,上海,200241 4. 温州大学,物理与电子信息学院,浙江,温州,325027 |
| 基金项目： | 国家自然科学基金;浙江省自然科学基金 |
| 摘 要： | 采用金属单质靶和直流反应溅射制备了不同Al含量(摩尔分数)掺杂的ZnO薄膜,得到的薄膜均为c-轴择优取向的纤锌矿结构,在可见波段具有很高的透过率。薄膜的晶面间距、光学折射率和带隙在掺Al的起始阶段变化很大,待Al掺杂量达到一定值后,光学折射率和带隙的变化不大,薄膜的晶面间距趋于一稳定值0.266 nm。分析表明掺杂的Al均作为施主对载流子浓度作出了贡献,影响薄膜导电性能的主要原因被推断为晶格中的缺陷等因素导致了载流子的局域束缚。 |
| 关 键 词： | ZnO薄膜 电阻率 反应溅射 |
| 文章编号： | 1004-2474（2007）03-0324-04 |
| 修稿时间： | 2006-02-28 |
Effect of Al Doping on the DC Reaction Sputtered ZnO Thin Films |
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| ZHAO Qiang,SUN Yan,ZHENG Ding-wei,NI Sheng,WANG Ji-qing,YUAN Xian-zhang.Effect of Al Doping on the DC Reaction Sputtered ZnO Thin Films[J].Piezoelectrics & Acoustooptics,2007,29(3):324-327. | |
| Authors: | ZHAO Qiang SUN Yan ZHENG Ding-wei NI Sheng WANG Ji-qing YUAN Xian-zhang |
| Affiliation: | 1. Dept. of Physics, East China Normal University, Shanghai 200241 ,China; 2. Shanghai Institute of Technical Physics, Chinese Academy of Science, Shanghai 200083,China; 3. Dept. of Electric Science and Technology, East China Normal University, Shanghai 200241,China; 4. School of Physics and Electric Information, Wenzhou University, Wenzhou 325027,China |
| Abstract: | ZnO films with c-orientation and high transmission were grown by dc reaction sputtering with Zn and Al element targets.In the initial stage of Al doping,the inter-planar distance,the optical refractive index and the band-gap changed significantly.Then,as Al content increases,the optical refractive index and the band-gap change slowly,and the inter-planar distance reaches a stable value of 0.266 nm.The analyses reveal that all of doped Al atoms provide carries as donors,and the results also indicate that the conductivity of the films mainly depends on the carrier localization caused by the lattice defects. |
| Keywords: | ZnO film resistivity reaction sputter |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |