| 微泵电磁致动器的研制与测试 |
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| 引用本文： | 龚秋莲,周兆英.微泵电磁致动器的研制与测试[J].测试技术学报,1998,12(3):376-381. |
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| 作者姓名： | 龚秋莲 周兆英 |
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| 作者单位： | 清华大学精密仪器与机械学系
(龚秋莲，周兆英，王晓浩，张文栋)，清华大学精密仪器与机械学系(夏邑) |
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| 摘 要： | 本文阐述了微型机电系统领域中微泵的几种常见的致动方式及其特点。根据硅微泵的结构特点，制作出用于微型泵的电磁致动器，并对该电磁致动器进行了分析与振动测试。
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| 关 键 词： | 微型泵 电磁致动器 振动测试 MEMS |
The Fabrication and Test of Magnetic Driver for Micro Pump |
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| Gong Qiulian Zhou Zhaoying Wang Xiaohao Zhang Wendong Xia yi.The Fabrication and Test of Magnetic Driver for Micro Pump[J].Journal of Test and Measurement Techol,1998,12(3):376-381. |
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| Authors: | Gong Qiulian Zhou Zhaoying Wang Xiaohao Zhang Wendong Xia yi |
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| Affiliation: | Gong Qiulian Zhou Zhaoying Wang Xiaohao Zhang Wendong Xia yi Department of Precision Instruments & Mechanology .Tsinghua University |
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| Abstract: | Several common micro mechanical driving modes as well as their characteristic of micro-pump in MEMS field are described in this paper. A electromagnetic actuator was designed and fabricated to drive silicon micro-pump membrane. Some theoretical analysis and experimental evaluation were made in this paper. |
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| Keywords: | Micro pump Magnetic driver vibration test |
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