Self-organization of quantum dots in multilayer InAs/GaAs and InGaAs/GaAs structures in submonolayer epitaxy |
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Authors: | G. É. Tsyrlin V. N. Petrov S. A. Masalov A. O. Golubok |
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Affiliation: | (1) Institute of Analytic Instrument Building, Russian Academy of Sciences, 198103 St. Petersburg, Russia |
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Abstract: | The experimental results of RHEED and scanning tunneling microscopy investigations of multilayer structures of InGaAs/GaAs quantum dots, obtained by submonolayer epitaxy on singular and vicinal GaAS (100) substrates, are reported. The results presented show that spatial ordering of nano-objects exists in multilayer structures for InAs and heteroepitaxial InGaAs layers. Fiz. Tekh. Poluprovodn. 33, 733–737 (June 1999) |
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