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Optical Emission Spectroscopy of Electron Cyclotron Resonance-Plasma Enchanced Metalorganic Chemical Vapor Deposition Process for Deposition of GaN Film |
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| Authors: | FU Silie CHEN Junfang LI Yun LI Wei ZHANG Maoping HU Shejun |
| Affiliation: | School of Physics and Communication Engineering, South China Normal University,Guangzhou 510006, China |
| Abstract: | ECR-MOPECVD, OES, GaN film, XRD |
| Keywords: | ECR-MOPECVD OES GaN film XRD |
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