Nd:YAG纳秒脉冲激光水下烧蚀锗靶研究

激光在液体中烧蚀靶材不仅能改变靶材表面形貌，还能在溶液中制备出微纳材料。作为一种“绿色”、低成本以及方便操作的材料制备方法受到许多学者的关注。利用Nd:YAG纳秒脉冲激光在水下烧蚀锗靶制备微米级和亚微米级锗颗粒。通过紫外-可见吸收光谱、X射线衍射谱（XRD）和扫描电子显微镜（SEM），研究了锗颗粒产物的特性。接着，具体研究了锗靶在激光烧蚀后的凹坑形貌和烧蚀质量。发现烧蚀质量随着激光脉冲次数的增加而增加，但增加的比例却在下降，即烧蚀效率在降低。最后，分析了烧蚀效率降低的原因，为提高液相激光烧蚀法制备材料的效率提供理论参考和可行方案。

Study on Nd:YAG ns pulsed laser ablation of Ge target in water

Laser ablation in liquid can modify the target morphology, as well as fabricate micro-nano materials in the solution. Many researchers were attracted by this method, because it was chemically clean, low cost and simple operation. Here, germanium particles with micron and submicron scale were prepared by Nd: YAG nanosecond pulsed laser ablation in water. The characteristics of germanium particles were studied by ultraviolet-visible absorption spectrum (uv-vis), X-ray diffraction (XRD) and scanning electron microscope (SEM). Then, studied the target morphology and ablation quality were studued after laser ablation of the germanium target. It was found that the ablation quality increases with the number of laser pulses, but the increase rate decreases, which means the ablation efficiency decreases. Finally, the reasons for the decrease of ablation efficiency were discussed to provide theoretical reference and feasible strategy for improving the preparation rate of materials fabricated by laser ablation in liquid.