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线阵InGaAs光谱谱线定标方法的应用
引用本文:陶珺,张霞.线阵InGaAs光谱谱线定标方法的应用[J].半导体技术,2009,34(12).
作者姓名:陶珺  张霞
作者单位:武汉理工大学,理学院物理系,武汉,430070;华中科技大学,数字化工程中心,武汉,430074
基金项目:国家自然科学基金重点项目 
摘    要:根据光纤光栅传感解调系统中检测中心波长偏移的特点,提出了一种利用线阵InGaAs作为光谱接收器件的波长解调系统,光谱谱线定位受系统中透射光栅狭缝和线阵InGaAs像元尺寸大小的影响,需要对该解调系统进行标定.在分析线阵InGaAs成像模型的基础上,用最小二乘法进行曲线拟和,获得谱线波长与线阵光电探测器阵列像元之间定位的数值计算方法,以确定光谱线在线阵InGaAs上的精确定位,使光谱谱线的定位精度得到提高.实验结果证明了该方法的可行性和有效性,提高了解调系统的精度.

关 键 词:光纤光栅传感解调  线阵  谱线波长  最小二乘法

Application of Calibration Method to the Optic Spectrum Line of Linear InGaAs
Tao Jun,Zhang Xia.Application of Calibration Method to the Optic Spectrum Line of Linear InGaAs[J].Semiconductor Technology,2009,34(12).
Authors:Tao Jun  Zhang Xia
Abstract:In accordance with the characteristics of wavelength shift detecting in fiber grating sensor demodulation system, the wavelength demodulation system which use linear InGaAs as spectrum receiver was proposed. Orientation of optic spectrum line is affected by silt of volume phase grating and the size of InGaAs photosensitive unit, so the calibration method is needed. Based on an analysis of InGaAs imaging model, least square curve fitting method was proposed to detect spectrum wavelength and InGaAs photosensitive unit position. The experimental results show that the methods are effective and the demodulation system precision is improved.
Keywords:fiber grating sensor demodulation  linear  spectrum wavelength  least square curve fitting
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