| 交替型暗域相移掩模的并行算法 |
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| 引用本文： | 闫大顺,周强,蔡懿慈,洪先龙.交替型暗域相移掩模的并行算法[J].微电子学,2007,37(5):667-670. |
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| 作者姓名： | 闫大顺 周强 蔡懿慈 洪先龙 |
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| 作者单位： | 1. 仲恺农业技术学院,计算机科学与工程学院,广州,510225
2. 清华大学,计算机科学与技术系,北京,100084 |
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| 摘 要： | 设计并实现了一种暗域相移掩模(PSM)问题的并行算法。首先根据"分而治之"的原则,将输入版图划分为若干尺寸较小的、易于解决的子版图;然后分配每个子版图给不同的进程,各个进程同时独立地消除子版图的相位冲突;最后将所有的子版图重新组合,生成没有相位冲突的相移掩模版图。实验结果表明,采用4进程的并行PSM算法,可以减少近64.3%的计算时间,获得2.8的加速比。算法还可以有效地减少冲突图中冲突的数目和边的数目。
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| 关 键 词： | 相移掩模 交替型相移掩模 并行算法 暗域 |
| 文章编号： | 1004-3365（2007）05-0667-04 |
| 修稿时间： | 2007-02-26 |
New Parallel Algorithm for Layout of Dark Field Alternating Phase Shifting Masks |
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| YAN Da-shun,ZHOU Qiang,CAI Yi-ci,HONG Xian-long.New Parallel Algorithm for Layout of Dark Field Alternating Phase Shifting Masks[J].Microelectronics,2007,37(5):667-670. |
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| Authors: | YAN Da-shun ZHOU Qiang CAI Yi-ci HONG Xian-long |
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| Affiliation: | 1. College of Computer Science and Engineering, Zhongkai University of Agriculture and Technology ,Guangzhou 510225, P. R. China; 2. Dept. of Computer Science and Technology, Tsinghua University ,Beijing 100084, P. R. China |
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| Abstract: | A new parallel algorithm,AltPSM,for layout of dark field was proposed and realized.In this algorithm,the input layout was divided into smaller,easier-to-solve parts as equally as possible via a user-controlled processing;then,each processor executes AltPSM design independently and simultaneously;and finally,a processor recombines the sub-layouts and modifies the total layout.Results from the experiments indicated that the proposed method parallelized AltPSM to obtain 2.8 of speedup.Moreover,the algorithm could reduce computing time by 64.3%. |
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| Keywords: | Phase-shift mask Alternating phase-shift mask Parallel algorithm Dark field |
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