| 纳米金刚石薄膜研究进展 |
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| 引用本文： | 王学根,孙方宏,张志明,沈荷生,陈明.纳米金刚石薄膜研究进展[J].金刚石与磨料磨具工程,2003(5):1-7. |
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| 作者姓名： | 王学根 孙方宏 张志明 沈荷生 陈明 |
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| 作者单位： | 上海交通大学,机械与动力工程学院,上海,200030 |
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| 基金项目： | 国家863计划新材料领域纳米材料与微机电系统专项资助项目(No.2002AA302613),上海市科技发展基金纳米专项资助项目(No.0159nm033) |
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| 摘 要： | 本文对纳米金刚石薄膜的研究现状和发展趋势进行了综合评述，从纳米金刚石薄膜的沉积原理和工艺以及纳米效应表征等方面分析了国内外最新研究成果，比较了常规和纳米金刚石薄膜不同沉积工艺和形核生长机理，对纳米金刚石薄膜的硬度、内应力、摩擦特性等机械性能也作了概述，在此基础上，提出在常规金刚石薄膜基础上沉积纳米金刚石薄膜组成复合涂层的新方法。
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| 关 键 词： | 纳米金刚石薄膜 化学气相沉积 复合涂层 研究进展 CVD |
| 文章编号： | 1006-852X(2003)05-0001-07 |
| 修稿时间： | 2003年6月15日 |
PROGRESS OF THE RESEARCHES ON NANOCRYSTALLINE DIAMOND FILM |
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| Wang Xuegen Sun Fanghong Zhang Zhiming Shen Hesheng Chen Ming.PROGRESS OF THE RESEARCHES ON NANOCRYSTALLINE DIAMOND FILM[J].Diamond & Abrasives Engineering,2003(5):1-7. |
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| Authors: | Wang Xuegen Sun Fanghong Zhang Zhiming Shen Hesheng Chen Ming |
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| Abstract: | In this paper, the latest development of nanocrystalline diamond films with regard to nucleation and growth mechanism, deposition technology and its research trend were introduced. The differences between conventional and nanocrystalline diamond films in terms of nucleation and growth mechanism and deposition technology were compared. And also, the mechanical performance of nanocrystalline diamond films such as hardness, compressive stress, tribological properties and so on were analyzed. At last, a new method of forming composite diamond coatings by depositing nanocrystalline diamond film onto conventional diamond film layer was put forward. |
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| Keywords: | nanocrystalline diamond films chemical vapor deposition (CVD) composite coatings |
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