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Lithography: A Portable,Benchtop Photolithography System Based on a Solid‐State Light Source (Small 22/2011) |
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| Authors: | Mark D. Huntington Teri W. Odom |
| Affiliation: | 1. Department of Materials Science and Engineering, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208;2. Department of Chemistry, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208 |
| Abstract: | |
| Keywords: | photolithography microfabrication nanofabrication microfluidics soft lithography |