| Ti／Al多层金属薄膜AES深度剖析的目标因子分析 |
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| 引用本文： | 谢舒平,郭云.Ti／Al多层金属薄膜AES深度剖析的目标因子分析[J].真空与低温,1995,1(4):187-191. |
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| 作者姓名： | 谢舒平 郭云 |
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| 作者单位： | 兰州物理研究所 |
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| 摘 要： | 目标因子分析法（ＴＦＡ）是一种对多元系统进行统计分析的计算数学方法。结合这种方法对Ｔｉ／Ａｌ多层金属薄膜的俄歇电子谱（ＡＥＳ）深度剖析结果进行了仔细的分析，获得了Ｔｉ、Ａｌ、Ｏ、Ｓｉ各元素的化合状态的深度分布情况，并与Ｘ射线光电子谱（ＸＰＳ）分析结果相一致．
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| 关 键 词： | 目标因子分析法，AES深度剖析，化学态，Ti／Al多层薄膜，XPS分析 |
TARGET FACTOR ANALYSIS IN AES DEPTH PROFILING OF Ti/Al MULTIFILM |
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| Xie Shuping,Guo Yun,Yang Dequan, Fan Chuizhen.TARGET FACTOR ANALYSIS IN AES DEPTH PROFILING OF Ti/Al MULTIFILM[J].Vacuum and Cryogenics,1995,1(4):187-191. |
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| Authors: | Xie Shuping Guo Yun Yang Dequan Fan Chuizhen |
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| Abstract: | Target Factor Analysis(TFA)is kind of mathematical technique for solving multidi-mensional problems of a certain type. By means of the technique,AES depth profiles of Ti/Al multi-film has been thoroughly studied in this paper. Each chemical state of Ti,Al,O, Si elements in depth distribution is obtained,and they were consistent with XPS analysis results. |
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