| 四氯化硅氢化研究进展 |
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| 引用本文： | 陈其国,陈涵斌,满慈皊.四氯化硅氢化研究进展[J].氯碱工业,2010,46(6):27-30. |
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| 作者姓名： | 陈其国 陈涵斌 满慈皊 |
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| 作者单位： | 江苏中能硅业科技发展有限公司,江苏,徐州,221004 |
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| 摘 要： | 综述了四氯化硅热氢化法、氯氢化法和等离子体氢化法制备三氯氢硅的最新进展,并对这3种技术进行了对比。
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| 关 键 词： | 四氯化硅 三氯氢硅 多晶硅 热氢化 氯氢化 等离子体法氢化 |
Progress in research of hydrogenation of silicon tetrachloride |
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| CHEN Qiguo,CHEN Hanbin,Man Ciling.Progress in research of hydrogenation of silicon tetrachloride[J].Chlor-Alkali Industry,2010,46(6):27-30. |
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| Authors: | CHEN Qiguo CHEN Hanbin Man Ciling |
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| Affiliation: | ling (Jiangsu Zhongneng Polysilicon Technology Development Co. , Ltd. , Xuzhou 221004, China) |
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| Abstract: | The recent advances in the hydrogenation process of silicon tetrachloride, which includes thermal hydrogenation, hydrochlorination and plasma hydrogenation, are reviewed. The above three kinds of technique are compared. |
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| Keywords: | silicon tetrachloride trichlorosilane polysilicon thermal hydrogenation hydrochlorination plasma hydrogenation |
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