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Mechanical characterization of chemical-vapor-deposited polycrystalline 3C silicon carbide thin films |
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| Authors: | Sharvani Nagappa Marc Zupan C.A. Zorman |
| Affiliation: | aDepartment of Mechanical Engineering, University of Maryland Baltimore County (UMBC), Baltimore County, Baltimore, MD 21250, USA;bDepartment of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, OH 44106, USA |
| Abstract: | |
| Keywords: | Silicon carbide Chemical vapor deposition Nanoindentation thin films |
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