| 二维亚波长抗反射光栅的制作及其特性分析 |
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| 引用本文： | 赵凤梅,刘守,张向苏,任雪畅. 二维亚波长抗反射光栅的制作及其特性分析[J]. 激光杂志, 2009, 30(2): 32-33 |
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| 作者姓名： | 赵凤梅 刘守 张向苏 任雪畅 |
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| 作者单位： | 厦门大学物理学系,福建厦门,361005;厦门大学物理学系,福建厦门,361005;厦门大学物理学系,福建厦门,361005;厦门大学物理学系,福建厦门,361005 |
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| 摘 要： | 运用等效介质理论研究了占空比随深度变化的二维亚波长光栅的抗反射原理。对全息干涉法制得的正弦型光栅进行了详细分析,表明这类光栅形成了渐变折射率的抗反膜结构。设计并利用两柬相干光对称入射到记录介质（光刻胶）分两次曝光的全息方法制备了适用于可见波段的周期为310nm的二维正交正弦型光栅。测试结果表明这种光栅在整个可见光波段具有增透作用,有潜力作为传统抗反膜的替代品。将具有浮雕结构的记录介质为母版并采用模压或浇铸等方法,可将结构复制到其它材料上。这类抗反射材料具有制作简单、成本低、可大批量生产等优点。
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| 关 键 词： | 抗反射 全息术 等效介质理论 亚波长光栅 |
Fabrication and characteristic analysis of two-dimensional anti-reflective subwavelength periodic gratings |
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| ZHAO Feng-mei,LIU Shou,ZHANG Xiang-shu,REN Xue-chang. Fabrication and characteristic analysis of two-dimensional anti-reflective subwavelength periodic gratings[J]. Laser Journal, 2009, 30(2): 32-33 |
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| Authors: | ZHAO Feng-mei LIU Shou ZHANG Xiang-shu REN Xue-chang |
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| Affiliation: | Department of Physics;Xiamen University;Xiamen 361005;China |
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| Abstract: | On the base of the effective medium theory(EMT),the anti-reflection property of subwavelength cross gratings with filling factors changing with depth is studied.Sinusoidal shaped gratings fabricated with holographic lithography are analyzed in detail,indicating that this kind of grating can form the structure similar to graded index anti-reflective coatings.Two-dimensional sinusoidal cross gratings with 310 nm period were designed and fabricated using double-exposure method,with two coherent beams symmetric... |
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| Keywords: | antireflection holography effective medium theory subwavelength periodic grating |
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