| 高g值高频响微机械加速度计研究 |
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| 引用本文： | 余尚江,李科杰. 高g值高频响微机械加速度计研究[J]. 探测与控制学报, 2005, 27(5): 30-33,36 |
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| 作者姓名： | 余尚江 李科杰 |
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| 作者单位： | 1. 北京理工大学机电工程学院,北京,100081;总参工程兵科研三所,河南,洛阳,471023
2. 北京理工大学机电工程学院,北京,100081 |
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| 摘 要： | 针对侵彻武器测试过程中冲击过载大和频率范围宽的特点,提出了一种微机械电容式加速度计结构,结构中采用分布在整个芯片上的小电容阵列来代替位于中间的单个大电容器.利用ANSYS对加速度计进行了仿真分析,得出加速度计的固有频率超过600 kHz,抗过载能力超过200 000 g,且电容变化量大,灵敏度高.文中还给出了加速度计芯片的加工工艺流程和接口电路.
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| 关 键 词： | 加速度 微机械 高g 有限元分析 |
| 文章编号： | 1008-1194（2005）05-0030-04 |
| 收稿时间： | 2005-05-31 |
| 修稿时间： | 2005-05-31 |
Study on High-g and High-frequency Micromachined Accelerometer |
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| YU Shang-jiang,LI Ke-jie. Study on High-g and High-frequency Micromachined Accelerometer[J]. Journal of Detection & Control, 2005, 27(5): 30-33,36 |
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| Authors: | YU Shang-jiang LI Ke-jie |
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| Affiliation: | 1. Beijing Institute of Technology, School of Mechatronic Engineering, Beijing 100081, China; 2. The Third Engineer Scientific Research Institute of the Headquarters of the General Staff, Luoyang 471023, China |
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| Abstract: | The high penetrator weapon, overload and wide frequency response will be produced in the process of irruption of so a micromachined capacitance accelerometer is brought forward to measure its over-loading parameters. The structure of the accelerometer adopts an array of small capacitors in the top wafer rather than a big capacitor in the center. Using FEM simulation by ANSYS, the results show that the natural frequency of accelerometer is more than 600KHz, the maximum of overload measurement exceeds 200000g and the large capacitance variation makes the high sensitivity of accelerometer. Also the process sequence for the fabrication of accelerometer and measuring circuit are presented in this paper. |
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| Keywords: | accelerometer micro - machine high g FEM analysis |
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