| 仿纤毛MEMS三轴振动传感器的设计 |
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| 作者姓名： | Li Zhen Zhang Guojun Xue Chenyang Wu Shujuan |
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| 作者单位： | [1]Key Laboratory of Instrumentation Science ＆ Dynamic Measurement, Ministry of Education, Taiyuan 030051, China [2]Science and Technology on Electronic Test ＆ Measurement Laboratory, North University of China, Taiyuan 030051, China |
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| 基金项目： | 国家高技术研究发展计划(863计划)(批准号:2011AA040404)、国家自然科学基金青年科学基金(批准号:51205374)和国家自然科学基金专项基金（批准号:61127008）资助的课题. |
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| 摘 要： | A biomimetic three-dimensional piezoresistive vibration sensor based on MEMS technology is reported.The mechanical properties of the sensor are analyzed and the static and dynamic characteristics of the sensor are simulated by ANSYS Workbench12.0.The structure was made by MEMS processes including lithography,ion implantation,PECVD,etching,etc.Finally,the sensor is tested by using a TV5220 sensor auto calibration system.The results show that the lowest sensitivity of the sensor is 394.7 V/g and can reach up to 460.2 V/g,and the dimension coupling is less than 0.6152%,and the working frequency range is 0–1000 Hz.
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| 关 键 词： | vibration sensor MEMS,bionic ANSYS |
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