| 10 cm×10 cm Bulk Micromegas探测器的研制 |
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| 引用本文： | 李沛玉,周静,陈雷,赵明锐,智宇,刘雯迪,贾世海,张昀昱,胡守扬,于伟翔,李笑梅.10 cm×10 cm Bulk Micromegas探测器的研制[J].原子能科学技术,2020,54(6):963-967. |
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| 作者姓名： | 李沛玉 周静 陈雷 赵明锐 智宇 刘雯迪 贾世海 张昀昱 胡守扬 于伟翔 李笑梅 |
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| 作者单位： | 中国原子能科学研究院 核数据重点实验室，北京102413 |
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| 摘 要： | Bulk Micromegas探测器是一种新型微结构气体探测器。利用光蚀刻技术制作了有效面积为10 cm×10 cm的多通道Bulk Micromegas探测器。对探测器的各通道进行了电容测试，显示探测器具有较好的均匀性。在Ar+10%CO2气体中，使用55Fe放射源和自主研制的基于APV25前端卡的数字化电子学，对制作的有效面积为10 cm×10 cm的探测器进行了测试，其结果显示探测器性能良好，能得到清晰的二维事件分布图。该探测器目前全部工艺国产化，并能进行批量生产，成品率接近100%。
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| 关 键 词： | Bulk Micromegas APV25 光蚀刻技术 前端电子学 |
Research and Development of 10 cm×10 cm Bulk Micromegas Detector |
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| LI Peiyu,ZHOU Jing,CHEN Lei,ZHAO Mingrui,ZHI Yu,LIU Wendi,JIA Shihai,ZHANG Yunyu,HU Shouyang,YU Weixiang,LI Xiaomei.Research and Development of 10 cm×10 cm Bulk Micromegas Detector[J].Atomic Energy Science and Technology,2020,54(6):963-967. |
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| Authors: | LI Peiyu ZHOU Jing CHEN Lei ZHAO Mingrui ZHI Yu LIU Wendi JIA Shihai ZHANG Yunyu HU Shouyang YU Weixiang LI Xiaomei |
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| Affiliation: | Key Laboratory of Nuclear Data, China Institute of Atomic Energy, Beijing 102413, China |
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| Abstract: | Bulk Micromegas detector is a new type of microstructure gas detector. A multi-channel Bulk Micromegas detector with an effective area of 10 cm×10 cm was fabricated by using photolithography. Capacitance tests were performed on each channel of the detector, showing good uniformity of the detector. The detector with an effective area of 10 cm × 10 cm was tested in the gas of Ar+10%CO2, using 55Fe radioactive source and digital electronics based on APV25 front-end card independently. The detector achieved good performance, obtaining a clear two-dimensional event distribution map. At present, all the processes of this detector can be made locally in China and can be mass-produced, and the yield rate is close to 100%. |
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| Keywords: | Bulk Micromegas APV25 photolithography front end electronics |
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