多向复合超声换能器有限元分析与试验

超声换能器是微电子封装技术的核心执行元件，为解决传统一维纵振超声换能器键合效率低、键合面不均匀及键合点不牢靠等问题，采用ANSYS仿真软件建立换能器有限元模型进行模态分析及谐响应分析，设计了一种可同时实现轴向纵振、水平弯振及竖直俯仰振动的40 kHz多向复合夹心压电式超声换能器。其中，压电部分由整圆环和可单独激励的1/4圆环陶瓷片组成。利用阻抗分析仪实物测试，得到换能器纵振、弯振及俯仰振动的阻抗 频率特性曲线。结果表明，测试值与仿真值基本一致，且结构性能参数均符合键合要求，验证了该结构的合理性。

Finite Element Analysis and Experiment of Multi directional Composite Ultrasonic Transducer

The ultrasonic transducer is the core actuator of microelectronic packaging technology. In order to solve the problems of low bonding efficiency, uneven bonding surface and insecure bonding point of traditional one dimensional longitudinal vibration ultrasonic transducer, the finite element model of transducer is established by ANSYS simulation software for modal analysis and harmonic response analysis. A kind of 40 kHz multi directional composite sandwich piezoelectric ultrasonic transducer that can realize axial longitudinal vibration, horizontal bending vibration and vertical pitching vibration at the same time is designed. Among them, the piezoelectric part consists of a whole ring and a 1/4 ring ceramic sheet which can be excited separately. The impedance frequency characteristic curves of longitudinal vibration, bending vibration and pitching vibration of the transducer are obtained by the physical test of the impedance analyzer. The results show that the test values are basically consistent with that of the simulation analysis, and the structural performance parameters meet the bonding requirements, which verify the rationality of the structure.