微细电极的正交点电接触在线测量及组合制作工艺

为服务于微细电火花加工用微细工具电极在线制作，提出一种正交点电接触标准细棒的微细电极在线测量方法。将电极轴线与标准细棒轴线正交（垂直）布置，通过电极外径与标准细棒外径之间低压电感知的点接触方式，避免或减少标准棒尺寸误差和安装误差的影响。提出采用自穿孔成形伺服反拷法和线电极磨削法组合工艺，并结合在线测量反馈方式，实现了钨材料微细电极较高效率的在线制作，尺寸可控精度可达±1．5μm。

Online Measurement by Intersecting-point Electric Contact and Combined Fabrication Process for Micro Tool Electrodes

To assist online fabrication of micro electrodes used in micro electric discharge machining （EDM）,an online measurement method is proposed by introducing the intersecting-point electric contact between the micro electrode and a standard thin-rod. In the method, under the condition of the vertical arrangement of the electrode axis and the standard-rod axis, the mode of low- voltage point contact on diameter outer surfaces can avoid the dimensional error of the standard rod and reduce the setting error of the standard rod. In addition,a fabrication process combined the micro electrode machining method by self-drilled holes and the wire electric discharge grinding （WEDG） is presented for high-efficiency fabrication of micro electrode. By applying the combined process with online measurement method ,the micro electrodes of tungsten material can be achieved with controllable dimensional accuracy of ±1.5 μm.