Resonant Rutherford backscattering. Study ofa-axis YBaCuO films with very high crystallinity

Hybrid sputtering and the conventional dc-template sputtering methods were used to deposit highly crystallinea-axis films. The oxygen contents and disorder of the films were measured by the resonant Rutherford backscattering. The oxygen content of the films deposited by the hybrid sputtering depend on the deposition temperature. Films deposited at a low temperature have low oxygen content. The poor superconducting properties of these films may be due to the oxygen deficiency. The stoichiometry of the films deposited by the dc-template sputtering method was found to depend on the microstructure of the template. The disorder at the Ba and O sublattices of these highly crystallinea-axis films are uncorrelated.