超声跟踪法制作误差对器件性能的影响及补偿

研究发现快模入射超声跟踪氧化碲器件的布喇格损耗频响对于参数误差十分敏感,因而制作误差可能对器件性能有较大影响。本文系统研究了这种影响及其补偿方法,结果表明,当相邻两换能片之间中心距S有5%的误差和声偏置角丫_0有10%的误差时,通过调整入射角θ_1可作出完全的补偿。

Influence of Manufacturing Errors of Beam Steering Method on Device performance and Its Compensation

It has been, found that the frequency response curve of Bragg loss of pnasea array TeO2 device with fast mode incidence is very sensitive to the manufacturing errors, i.e., the real values of the center-to-center distance between adjacent transducers and the acoustic bias angle deviate from their optimum values. So the manufacturing errors may seriously degrade the device performance. In this paper,we have systematically investigated such an influence and found a compensation method to recover the bestjperformance of the device.For a 5% deviation of the center-to-center distance between adjacent transducers, the best performance can be recovered by adjusting the incident angle of 0.063, while for a 10% deviation of the acoustic bias angle, the best performance can be recovered by adjusting the incident angle of 0.107.