A novel integration approach for combining the components to minimize a micro-fuel cell

This work employs porous silicon as a gas diffusion layer (GDL) in a micro-fuel cell. Pt catalyst is deposited on the surface of, and inside, the porous silicon by the physical vapor deposition (PVD) method, to improve the porous silicon conductivity. Porous silicon with Pt catalyst replaces traditional GDL, and the Pt metal that remains on the rib is used to form a micro-thermal sensor in a single lithographic process.