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A review of silicon-based wafer bonding processes,an approach to realize the monolithic integration of Si-CMOS and Ⅲ-Ⅴ-on-Si wafers
作者单位:Low Energy Electronic Systems(LEES),Singapore-MIT Alliance for Research and Technology(SMART),Singapore 138602,Singapore;Low Energy Electronic Systems(LEES),Singapore-MIT Alliance for Research and Technology(SMART),Singapore 138602,Singapore;Low Energy Electronic Systems(LEES),Singapore-MIT Alliance for Research and Technology(SMART),Singapore 138602,Singapore;Low Energy Electronic Systems(LEES),Singapore-MIT Alliance for Research and Technology(SMART),Singapore 138602,Singapore;Low Energy Electronic Systems(LEES),Singapore-MIT Alliance for Research and Technology(SMART),Singapore 138602,Singapore;School of Electronics and Information Technology,Sun Yat-Sen University,Guangzhou 510006,China;Low Energy Electronic Systems(LEES),Singapore-MIT Alliance for Research and Technology(SMART),Singapore 138602,Singapore;Low Energy Electronic Systems(LEES),Singapore-MIT Alliance for Research and Technology(SMART),Singapore 138602,Singapore;Low Energy Electronic Systems(LEES),Singapore-MIT Alliance for Research and Technology(SMART),Singapore 138602,Singapore;Department of Electrical and Computer Engineering,National University of Singapore,Singapore 117576,Singapore;Low Energy Electronic Systems(LEES),Singapore-MIT Alliance for Research and Technology(SMART),Singapore 138602,Singapore;Materials Research Laboratories,Massachusetts Institute of Technology,Cambridge,MA,02139,USA;Low Energy Electronic Systems(LEES),Singapore-MIT Alliance for Research and Technology(SMART),Singapore 138602,Singapore;Department of Materials Science and Engineering,Massachusetts Institute of Technology,Cambridge,MA 02139,USA;Low Energy Electronic Systems(LEES),Singapore-MIT Alliance for Research and Technology(SMART),Singapore 138602,Singapore;School of Electrical and Electronic Engineering,Nanyang Technological University,Singapore 639798,Singapore;Low Energy Electronic Systems(LEES),Singapore-MIT Alliance for Research and Technology(SMART),Singapore 138602,Singapore
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